JPH0735392Y2 - 半導体の製造設備 - Google Patents
半導体の製造設備Info
- Publication number
- JPH0735392Y2 JPH0735392Y2 JP13880889U JP13880889U JPH0735392Y2 JP H0735392 Y2 JPH0735392 Y2 JP H0735392Y2 JP 13880889 U JP13880889 U JP 13880889U JP 13880889 U JP13880889 U JP 13880889U JP H0735392 Y2 JPH0735392 Y2 JP H0735392Y2
- Authority
- JP
- Japan
- Prior art keywords
- main body
- room
- prober
- floor
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title description 7
- 238000004519 manufacturing process Methods 0.000 title description 5
- 230000003749 cleanliness Effects 0.000 claims description 24
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 238000012360 testing method Methods 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 10
- 239000000428 dust Substances 0.000 description 6
- 238000012546 transfer Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000009193 crawling Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13880889U JPH0735392Y2 (ja) | 1989-11-30 | 1989-11-30 | 半導体の製造設備 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13880889U JPH0735392Y2 (ja) | 1989-11-30 | 1989-11-30 | 半導体の製造設備 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0379839U JPH0379839U (en]) | 1991-08-15 |
| JPH0735392Y2 true JPH0735392Y2 (ja) | 1995-08-09 |
Family
ID=31685886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13880889U Expired - Fee Related JPH0735392Y2 (ja) | 1989-11-30 | 1989-11-30 | 半導体の製造設備 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735392Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014001022A1 (de) * | 2014-01-27 | 2015-07-30 | Liebherr-Transportation Systems Gmbh & Co. Kg | Fahrzeugkühlkreislauf |
-
1989
- 1989-11-30 JP JP13880889U patent/JPH0735392Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0379839U (en]) | 1991-08-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |